Summit View 600/800 Summit View 600/800 fully automated wafer inspection system

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Source: https://viewmm.com/

Summit View 600/800 is produced by Quality Vision Internation INC, which is a large area, high-accuracy dimensional metrology systems.

However, it is only a stand-alone machine and it requires an operator to complete a whole cycle of measurement.

Based on the increasing requirements for automation, Wise Tech Robot started to develop an automation control system which integrates Summit View 600/800, Robot, linear slider, chuck, wafer cassette, aligner, Bar code reader, OCR, FFU and many other peripheral facilities to complete an complicated automated wafer inspection system for the wafer of 300mm. Besides that, Wise Tech Robot also develop a remote-control module for this station, so MES system can remote control the whole station through SECS/GEM.


Source: https://www.viewmm.com/index

The first unmanned measuring station with Summit View 600 has been successfully installed, and it has been verified and been accepted on October 2018 by the end user, which is the largest Outsourced Semiconductor Assembly and Test (OSAT) provider in the world. And it has been an automatic production line with accuracy and reliability for more than 5 months since then. About two months later, the second unmanned measuring station was installed and verified.

So now, Summit View 600/800 is no longer a stand-alone machine. It has been integrated into an unmanned measuring system for automated measuring application now.


Source: https://www.viewmm.com/index

Article Provider: Wise Tech Robot 卓智機器人

[kiwi wu]

Similar system form NanoFocus: NanoFocus µsprint: Fully automated wafer inspection

[kiwi wu]

Title: A fully automated 12” wafer inspection system

Customer: ASE GROUP

Background:

In this workstation the 12” wafer should be inspected by View Summit 625, which is a large area, high-accuracy dimensional metrology systems. However, it is only a stand-alone machine and it requires an operator to complete a whole cycle of measurement. Based on the requirements from ASE for automation, Wise-Tech Robot starts to develop a fully automated wafer inspection system for this workstation.

Technical Challenges:

1. The system should integrate and control View Summit 625 through Ethernet and Digital I/O.
2. The system should control Robot, linear slider, chuck, load-port, pre-aligner, Bar code reader, OCR/QR CCD, FFU.
3. The Robot must load/unload exactly from wafer cassette, Pre-aligner and the stage of View.
4. The system must provide available recipes for selection for different wafer types.
5. The system will used one Robot to serve two View Summit 625.
6. The system should have remote-control mode, so MES can remote control the whole station through SECS/GEM.
7. The system should have local mode, so it can run automatically without connecting to MES.
8. The system should have maintenance mode, so ASE engineer can control each equipment manually through user interface.
9. An error message should be displayed using dialog box when an unexpected condition occurs.
10. The system should provide the trouble-shooting instructions for ASE engineer when the system has an error message.
11. The system and all the equipment should have LOG file.
12. The system should provide the measurement results of each wafer.

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Procedures:

1. Define customer’s requirements
2. Develop UI of the system
3. Define the API which should be developed on View Summit 625 such that the system can integrate with View.
4. The master computer, which control the whole workstation, should connect to all peripherals with different communication protocols:
 System master computer use SECS/GEM protocol through Ethernet to communicate with MES system.
 System master computer Uses TCP/IP and Digital I/O to communicate with View Summit 625.
 System master computer use CAN bus through RS232 to communicate with the server motor of Linear Slider, which is an external axis of Robot, and it is used to expand robot working space.
 System master computer use TCP/IP protocol to communicate with Robot.
 System master computer use RS-232C to communicate Load PORTS.
 The communication map is designed
5. The Automatic with SECS/GEM ON (Remote Mode), Automatic with SECS/GEM OFF(Local Mode) and Maintain Mode are designed.
6. The Log files include System Run, Alarm, Product, Robot, Pre-Aligner, Loadport1, Loadport2, View1, View2, Secs/Gem, IO.
7. The system used one robot to serve two View Summit and they should have three different transportation modes. For example, if mixed mode is chosen, the robot will load wafer to one of the Views which is available.
8. The system should design the user manager system.

Results:

The fully automated 12” wafer inspection system measured with Summit View 625 started on 06/15/2018 and was accepted on 10/05/2019 by ASE. Due to the double production and the excellent performance with accuracy and reliability, ASE continues to place an order for two more system.

Due to the non-disclosure agreement with ASE, we are not allowed to take a video of the workstation for demonstration. However, A similar system from Nano-focus can be referred as the following:
https://www.youtube.com/watch?v=Xvg0_MkTz7w