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Summit View 600/800 is produced by Quality Vision Internation INC, which is a large area, high-accuracy dimensional metrology systems.
However, it is only a stand-alone machine and it requires an operator to complete a whole cycle of measurement.
Based on the increasing requirements for automation, Wise Tech Robot started to develop an automation control system which integrates Summit View 600/800, Robot, linear slider, chuck, wafer cassette, aligner, Bar code reader, OCR, FFU and many other peripheral facilities to complete an complicated unmanned measuring station for the wafer of 300mm. Besides that, Wise Tech Robot also develop a remote-control module for this station, so MES system can remote control the whole station through SECS/GEM.
The first unmanned measuring station with Summit View 600 has been successfully installed, and it has been verified and been accepted on October 2018 by the end user, which is the largest Outsourced Semiconductor Assembly and Test (OSAT) provider in the world. And it has been an automatic production line with accuracy and reliability for more than 5 months since then. About two months later, the second unmanned measuring station was installed and verified.
So now, Summit View 600/800 is no longer a stand-alone machine. It has been integrated into an unmanned measuring system for automated measuring application now.
Article Provider: Wise Tech Robot 卓智機器人
最後由 kiwi wu 於 2019年 6月 26日, 09:49 編輯，總共編輯了 1 次。
Similar system form NanoFocus: NanoFocus µsprint: Fully automated wafer inspection
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